[PDF.73mv] Defect Recognition and Image Processing in Semiconductors 1997: Proceedings of the seventh conference on Defect Recognition and Image Processing, ... 1997 (Institute of Physics Conference Series)

Defect Recognition and Image Processing in Semiconductors 1997: Proceedings of the seventh conference on Defect Recognition and Image Processing, ... 1997 (Institute of Physics Conference Series)

[PDF.ep32] Defect Recognition and Image Processing in Semiconductors 1997: Proceedings of the seventh conference on Defect Recognition and Image Processing, ... 1997 (Institute of Physics Conference Series)

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 | #6434846 in Books |  CRC Press |  1998-01-01 | Original language:English | PDF # 1 |  9.21 x1.19 x6.14l,2.07 | File type: PDF | 524 pages

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|| |listed in SPIE-OE Reports No 174, 1998 listed in Scitech Book News, September 1998 Abstracted in INSPEC Database. in SPIE-OE Reports No 174, 1998 listed in Scitech Book News, September 1998 Abstracted in INSPEC Database.

Defect Recognition and Image Processing in Semiconductors 1997 provides a valuable overview of current techniques used to assess, monitor, and characterize defects from the atomic scale to inhomogeneities in complete silicon wafers. This volume addresses advances in defect analyzing techniques and instrumentation and their application to substrates, epilayers, and devices. The book discusses the merits and limits of characterization techniques; standardization; correlati...

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