[PDF.48jm] Optical Imaging in Projection Microlithography (SPIE Tutorial Texts in Optical Engineering Vol. TT66)

Optical Imaging in Projection Microlithography (SPIE Tutorial Texts in Optical Engineering Vol. TT66)

[PDF.cv61] Optical Imaging in Projection Microlithography (SPIE Tutorial Texts in Optical Engineering Vol. TT66)

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 | #2397725 in Books |  2005-03-09 | Original language:English | PDF # 1 |  9.75 x6.75 x.50l,1.10 | File type: PDF | 276 pages

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Here for the first time is an integrated mathematical view of the physics and numerical modeling of optical projection lithography that efficiently covers the full spectrum of the important concepts. Alfred Wong offers rigorous underpinning, clarity in systematic formulation, physical insight into emerging ideas, as well as a system level view of the parameter tolerances required in manufacturing. Readers with a good working knowledge of calculus can follow the step-by-s...

You easily download any file type for your device.Optical Imaging in Projection Microlithography (SPIE Tutorial Texts in Optical Engineering Vol. TT66)   |  Alfred Kwok-Kit Wong. A good, fresh read, highly recommended.

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